Mechanical properties changes during electrothermal RF tuning in a nanoelectromechanical resonator

Hyong Seo Yoon, Byeongho Park, Joon Hyong Cho, Seong Chan Jun

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio frequencies under the moderate conditions. This study confirms a relatively low change in the quality factor (Q-factor) over a wide range of frequency tuning (Δfr = 2.4 MHz). The effective stress of the beam plays an important role in the resonance frequency modulation and is critical to the Q-factor during electrothermal tuning. The Q-factor was decreased with the stress variation. However, the resonant frequency is linearly tuned on the basis of varied effective beam stresses and no major scarification of the Q-factor was observed.

Original languageEnglish
Article number6517522
Pages (from-to)596-600
Number of pages5
JournalIEEE Transactions on Nanotechnology
Volume12
Issue number4
DOIs
Publication statusPublished - 2013 Jul 26

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

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