Mechanically flexible PZT thin films on plastic substrates

Jong Hyun Rho, Joung Ho Ahn, Nae Eung Lee, Jong Hyun Ahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We investigated the fabrication and properties of flexible PZT thin film on plastic substrate. The PZT active layer with Pt electrodes was fabricated on Si02/Si wafer by Sol-Gel method. These Pt/PZT/Pt layers were patterned by photolithography with optimized layouts. After Pt/PZT/Pt etching process, these layers were transferred on plastic substrate using elastomeric stamp. The properties of transferred layers were closed to that of traditional PZT devices on rigid bulk wafers.

Original languageEnglish
Title of host publicationINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages246-247
Number of pages2
DOIs
Publication statusPublished - 2010
Event2010 3rd International Nanoelectronics Conference, INEC 2010 - Hongkong, China
Duration: 2010 Jan 32010 Jan 8

Publication series

NameINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Other

Other2010 3rd International Nanoelectronics Conference, INEC 2010
CountryChina
CityHongkong
Period10/1/310/1/8

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Rho, J. H., Ahn, J. H., Lee, N. E., & Ahn, J. H. (2010). Mechanically flexible PZT thin films on plastic substrates. In INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings (pp. 246-247). [5424663] (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings). https://doi.org/10.1109/INEC.2010.5424663