Mechanism of the sensitivity enhancement in TiO2hollow-hemisphere gas sensors

Hi Gyu Moon, Ho Won Jang, Jin Sang Kim, Hyung-Ho Park, Seok Jin Yoon

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We investigate the mechanism of the sensitivity enhancement in TiO2 hollow-hemisphere gas sensors. Using monolayer close-packed polystyrene microspheres as a sacrificial template, a TiO2 thin film based on a network of ordered hollow hemispheres is formed by room-temperature sputtering deposition and subsequent calcination at 550°C. A thin film gas sensor based on the TiO2 hollow hemispheres exhibits a 225% change in its resistance when exposed to 50 ppm CO at 250°C, whereas a gas sensor based on a flat TiO2 film shows an 85% change. Numerical analysis reveals that the enhancement of the gas sensitivity in the hollow-hemisphere gas sensor is simply the result of an increase in the effective surface area for the adsorption of gas molecules.

Original languageEnglish
Pages (from-to)135-139
Number of pages5
JournalElectronic Materials Letters
Volume6
Issue number4
DOIs
Publication statusPublished - 2010 Dec 1

Fingerprint

Chemical sensors
Gases
Thin films
Polystyrenes
Carbon Monoxide
Microspheres
Calcination
Sputtering
Numerical analysis
Monolayers
Adsorption
Molecules
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Moon, Hi Gyu ; Jang, Ho Won ; Kim, Jin Sang ; Park, Hyung-Ho ; Yoon, Seok Jin. / Mechanism of the sensitivity enhancement in TiO2hollow-hemisphere gas sensors. In: Electronic Materials Letters. 2010 ; Vol. 6, No. 4. pp. 135-139.
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Mechanism of the sensitivity enhancement in TiO2hollow-hemisphere gas sensors. / Moon, Hi Gyu; Jang, Ho Won; Kim, Jin Sang; Park, Hyung-Ho; Yoon, Seok Jin.

In: Electronic Materials Letters, Vol. 6, No. 4, 01.12.2010, p. 135-139.

Research output: Contribution to journalArticle

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