Abstract: We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human’s life. Graphical Abstract: [Figure not available: see fulltext.].
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Acknowledgements This work was supported by a National Research Foundation of Korea grant funded by the Korean government (MEST; NRF-2015R1D1A1A01059806) and by a grant of the Korea Health Technology R&D Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health and Welfare, Republic of Korea (Grant No.: HI16C0272).
© 2018, The Korean Institute of Metals and Materials.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials