MEMS based integrated particle detection chip for real time environmental monitoring

H. H. Lim, D. Park, J. Y. Maeng, J. Hwang, Y. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

23 Citations (Scopus)

Abstract

In this paper, we report design, fabrication and characterization of a MEMS based integrated particle detection chip for real time environmental monitoring. The chip is designed on the basis of aerosol technology and is realized using micromachining processes. The complete device is composed of two parts, one is a micro virtual impactor for the classification of particles according to their sizes and the other is a micro corona discharger for measuring the particle concentration. The integrated chip is used for classifying bigger and smaller size particles and finally determining the number concentration by measuring the current carried by charged particles. In this experiment, the cut-off diameter of the particle was 550 nm. Since conventional particle detection equipments are relatively big in size and expensive as well, the proposed device will be the first step to the realization of low-cost and real-time environmental monitoring.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages62-65
Number of pages4
Volume2006
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

Fingerprint

environmental monitoring
microelectromechanical systems
MEMS
chips
Monitoring
Micromachining
Charged particles
Aerosols
Particle size
Fabrication
Costs
impactors
electric corona
Experiments
micromachining
classifying
aerosols
charged particles
cut-off
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lim, H. H., Park, D., Maeng, J. Y., Hwang, J., & Kim, Y. J. (2006). MEMS based integrated particle detection chip for real time environmental monitoring. In 19th IEEE International Conference on Micro Electro Mechanical Systems (Vol. 2006, pp. 62-65). [1627736]
Lim, H. H. ; Park, D. ; Maeng, J. Y. ; Hwang, J. ; Kim, Y. J. / MEMS based integrated particle detection chip for real time environmental monitoring. 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. pp. 62-65
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Lim, HH, Park, D, Maeng, JY, Hwang, J & Kim, YJ 2006, MEMS based integrated particle detection chip for real time environmental monitoring. in 19th IEEE International Conference on Micro Electro Mechanical Systems. vol. 2006, 1627736, pp. 62-65, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

MEMS based integrated particle detection chip for real time environmental monitoring. / Lim, H. H.; Park, D.; Maeng, J. Y.; Hwang, J.; Kim, Y. J.

19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. p. 62-65 1627736.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - In this paper, we report design, fabrication and characterization of a MEMS based integrated particle detection chip for real time environmental monitoring. The chip is designed on the basis of aerosol technology and is realized using micromachining processes. The complete device is composed of two parts, one is a micro virtual impactor for the classification of particles according to their sizes and the other is a micro corona discharger for measuring the particle concentration. The integrated chip is used for classifying bigger and smaller size particles and finally determining the number concentration by measuring the current carried by charged particles. In this experiment, the cut-off diameter of the particle was 550 nm. Since conventional particle detection equipments are relatively big in size and expensive as well, the proposed device will be the first step to the realization of low-cost and real-time environmental monitoring.

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Lim HH, Park D, Maeng JY, Hwang J, Kim YJ. MEMS based integrated particle detection chip for real time environmental monitoring. In 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006. 2006. p. 62-65. 1627736