MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Sang Myun Lee; Hong Lae Kim; Hong Beom Kwon; Kyongtae Kim; Seong Jae Yoo; Ui Seon Hong; Jungho Hwang; Yong Jun Kim

doi:10.1109/TRANSDUCERS.2019.8808773

MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Sang Myun Lee, Hong Lae Kim, Hong Beom Kwon, Kyongtae Kim, Seong Jae Yoo, Ui Seon Hong, Jungho Hwang, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1289-1292
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808773
Publication status	Published - 2019 Jun
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	19/6/23 → 19/6/27

All Science Journal Classification (ASJC) codes

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808773

Cite this

Lee, S. M., Kim, H. L., Kwon, H. B., Kim, K., Yoo, S. J., Hong, U. S., Hwang, J., & Kim, Y. J. (2019). MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1289-1292). [8808773] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808773

Lee, Sang Myun ; Kim, Hong Lae ; Kwon, Hong Beom et al. / MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1289-1292 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{bbb551ad79af4af7afadf6e064feacde,

title = "MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques",

abstract = "This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.",

author = "Lee, {Sang Myun} and Kim, {Hong Lae} and Kwon, {Hong Beom} and Kyongtae Kim and Yoo, {Seong Jae} and Hong, {Ui Seon} and Jungho Hwang and Kim, {Yong Jun}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808773",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1289--1292",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

note = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

}

Lee, SM, Kim, HL, Kwon, HB, Kim, K, Yoo, SJ, Hong, US, Hwang, J & Kim, YJ 2019, MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808773, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1289-1292, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808773

MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. / Lee, Sang Myun; Kim, Hong Lae; Kwon, Hong Beom et al.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1289-1292 8808773 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

AU - Lee, Sang Myun

AU - Kim, Hong Lae

AU - Kwon, Hong Beom

AU - Kim, Kyongtae

AU - Yoo, Seong Jae

AU - Hong, Ui Seon

AU - Hwang, Jungho

AU - Kim, Yong Jun

PY - 2019/6

Y1 - 2019/6

N2 - This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.

AB - This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.

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DO - 10.1109/TRANSDUCERS.2019.8808773

M3 - Conference contribution

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1289

EP - 1292

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Lee SM, Kim HL, Kwon HB, Kim K, Yoo SJ, Hong US et al. MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1289-1292. 8808773. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808773

MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Abstract

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All Science Journal Classification (ASJC) codes

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