MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Sang Myun Lee, Hong Lae Kim, Hong Beom Kwon, Kyongtae Kim, Seong Jae Yoo, Ui Seon Hong, Jungho Hwang, Yong Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1289-1292
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

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All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

Cite this

Lee, S. M., Kim, H. L., Kwon, H. B., Kim, K., Yoo, S. J., Hong, U. S., Hwang, J., & Kim, Y. J. (2019). MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1289-1292). [8808773] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808773