MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration

H. B. Kwon, S. J. Yoo, J. S. Han, S. M. Lee, U. S. Hong, J. H. Hwang, Y. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1286-1288
Number of pages3
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/TerritoryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

Bibliographical note

Funding Information:
This work was supported by the Industrial Strategic Technology Development Program (10077651, Development of IoT fusion sensor system based on artificial intelligence) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).

Publisher Copyright:
© 2018 IEEE.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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