This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.
|Title of host publication||2018 IEEE Micro Electro Mechanical Systems, MEMS 2018|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||3|
|Publication status||Published - 2018 Apr 24|
|Event||31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom|
Duration: 2018 Jan 21 → 2018 Jan 25
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Other||31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018|
|Period||18/1/21 → 18/1/25|
Bibliographical noteFunding Information:
This work was supported by the Industrial Strategic Technology Development Program (10077651, Development of IoT fusion sensor system based on artificial intelligence) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).
© 2018 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering