MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration

H. B. Kwon, S. J. Yoo, J. S. Han, S. M. Lee, U. S. Hong, J. H. Hwang, Y. J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1286-1288
Number of pages3
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

Fingerprint

magnification
microelectromechanical systems
MEMS
Particle size
Nanoparticles
nanoparticles
sensors
Sensors
Optical devices
optics
costs
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kwon, H. B., Yoo, S. J., Han, J. S., Lee, S. M., Hong, U. S., Hwang, J. H., & Kim, Y. J. (2018). MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 1286-1288). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346800
Kwon, H. B. ; Yoo, S. J. ; Han, J. S. ; Lee, S. M. ; Hong, U. S. ; Hwang, J. H. ; Kim, Y. J. / MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1286-1288 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{67f5872b5787429797250f604add5b98,
title = "MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration",
abstract = "This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.",
author = "Kwon, {H. B.} and Yoo, {S. J.} and Han, {J. S.} and Lee, {S. M.} and Hong, {U. S.} and Hwang, {J. H.} and Kim, {Y. J.}",
year = "2018",
month = "4",
day = "24",
doi = "10.1109/MEMSYS.2018.8346800",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1286--1288",
booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",
address = "United States",

}

Kwon, HB, Yoo, SJ, Han, JS, Lee, SM, Hong, US, Hwang, JH & Kim, YJ 2018, MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 1286-1288, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346800

MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration. / Kwon, H. B.; Yoo, S. J.; Han, J. S.; Lee, S. M.; Hong, U. S.; Hwang, J. H.; Kim, Y. J.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1286-1288 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration

AU - Kwon, H. B.

AU - Yoo, S. J.

AU - Han, J. S.

AU - Lee, S. M.

AU - Hong, U. S.

AU - Hwang, J. H.

AU - Kim, Y. J.

PY - 2018/4/24

Y1 - 2018/4/24

N2 - This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.

AB - This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.

UR - http://www.scopus.com/inward/record.url?scp=85047001981&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047001981&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346800

DO - 10.1109/MEMSYS.2018.8346800

M3 - Conference contribution

AN - SCOPUS:85047001981

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1286

EP - 1288

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Kwon HB, Yoo SJ, Han JS, Lee SM, Hong US, Hwang JH et al. MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1286-1288. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2018.8346800