Metalorganic chemical vapor deposition of TiO 2 :N anatase thin film on Si substrate

Dong Heon Lee, Yong Soo Cho, Woul In Yi, Tae Song Kim, Jeon Kook Lee, Hyung Jin Jung

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

Titanium dioxide thin film doped with nitrogen was deposited at 420°C on p-type silicon substrate by metalorganic chemical vapor deposition using titanium tetra-isopropoxide and nitrous oxide. From an x-ray diffraction result, when deposited at 420°C, only the anatase (101) peak and (200) peak were observed. Raman spectroscopy confirmed the presence of anatase phase without any rutile or TiN phase. X-ray photoelectron spectrum revealed that nitrogen was doped into the lattice of TiO 2 anatase. In the bulk of the film nitrogen peak was observed, and the spectrum of Ti 2p core level confirmed titanium-nitrogen bonding due to nitrogen incorporation into the anatase lattice.

Original languageEnglish
Number of pages1
JournalApplied Physics Letters
DOIs
Publication statusPublished - 1995 Dec 1

Fingerprint

anatase
metalorganic chemical vapor deposition
nitrogen
thin films
titanium
nitrous oxides
titanium oxides
rutile
photoelectrons
x ray diffraction
Raman spectroscopy
oxides
silicon
x rays

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Lee, Dong Heon ; Cho, Yong Soo ; Yi, Woul In ; Kim, Tae Song ; Lee, Jeon Kook ; Jin Jung, Hyung. / Metalorganic chemical vapor deposition of TiO 2 :N anatase thin film on Si substrate In: Applied Physics Letters. 1995.
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Metalorganic chemical vapor deposition of TiO 2 :N anatase thin film on Si substrate . / Lee, Dong Heon; Cho, Yong Soo; Yi, Woul In; Kim, Tae Song; Lee, Jeon Kook; Jin Jung, Hyung.

In: Applied Physics Letters, 01.12.1995.

Research output: Contribution to journalArticle

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T1 - Metalorganic chemical vapor deposition of TiO 2 :N anatase thin film on Si substrate

AU - Lee, Dong Heon

AU - Cho, Yong Soo

AU - Yi, Woul In

AU - Kim, Tae Song

AU - Lee, Jeon Kook

AU - Jin Jung, Hyung

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