Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Sung Jin Cho, Kwang Ryeol Lee, Kwang Yong Eun, Jun Hee Han, Dae Hong Ko

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

A simple method to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si wafer was suggested. This method involved etching a side of Si substrate using the DLC film as an etching mask. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with independent stress measurement by laser reflection method, this method allows calculation of the biaxial elastic modulus, E/(1-ν), where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus, E/(1-ν2), measured by nano-indentation, we could further determine the elastic modulus and Poisson's ratio, independently. This method was employed to measure the mechanical properties of DLC films deposited by C6H6 r.f. glow discharge at the deposition pressure 1.33 Pa. The elastic modulus, E, increased from 94 to 128 GPa as the negative bias voltage increased from 400 to 550 V. Poisson's ratio was estimated to be about 0.22 in this bias voltage range. For the negative bias voltages less than 400 V, however, the present method resulted in negative Poisson's ratio. The limitation of the present method was discussed.

Original languageEnglish
Pages (from-to)33-38
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume505
Publication statusPublished - 1998 Jan 1
EventProceedings of the 1997 MRS Fall Meeting - Boston, MA, USA
Duration: 1997 Nov 301997 Dec 4

Fingerprint

Diamond like carbon films
Poisson ratio
modulus of elasticity
Elastic moduli
diamonds
carbon
Bias voltage
Etching
electric potential
Substrates
etching
Diamond
stress measurement
Stress measurement
plane strain
Glow discharges
Nanoindentation
nanoindentation
glow discharges
Masks

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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title = "Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films",
abstract = "A simple method to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si wafer was suggested. This method involved etching a side of Si substrate using the DLC film as an etching mask. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with independent stress measurement by laser reflection method, this method allows calculation of the biaxial elastic modulus, E/(1-ν), where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus, E/(1-ν2), measured by nano-indentation, we could further determine the elastic modulus and Poisson's ratio, independently. This method was employed to measure the mechanical properties of DLC films deposited by C6H6 r.f. glow discharge at the deposition pressure 1.33 Pa. The elastic modulus, E, increased from 94 to 128 GPa as the negative bias voltage increased from 400 to 550 V. Poisson's ratio was estimated to be about 0.22 in this bias voltage range. For the negative bias voltages less than 400 V, however, the present method resulted in negative Poisson's ratio. The limitation of the present method was discussed.",
author = "Cho, {Sung Jin} and Lee, {Kwang Ryeol} and Eun, {Kwang Yong} and Han, {Jun Hee} and Ko, {Dae Hong}",
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Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films. / Cho, Sung Jin; Lee, Kwang Ryeol; Eun, Kwang Yong; Han, Jun Hee; Ko, Dae Hong.

In: Materials Research Society Symposium - Proceedings, Vol. 505, 01.01.1998, p. 33-38.

Research output: Contribution to journalConference article

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T1 - Method for independent measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

AU - Cho, Sung Jin

AU - Lee, Kwang Ryeol

AU - Eun, Kwang Yong

AU - Han, Jun Hee

AU - Ko, Dae Hong

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AB - A simple method to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si wafer was suggested. This method involved etching a side of Si substrate using the DLC film as an etching mask. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with independent stress measurement by laser reflection method, this method allows calculation of the biaxial elastic modulus, E/(1-ν), where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus, E/(1-ν2), measured by nano-indentation, we could further determine the elastic modulus and Poisson's ratio, independently. This method was employed to measure the mechanical properties of DLC films deposited by C6H6 r.f. glow discharge at the deposition pressure 1.33 Pa. The elastic modulus, E, increased from 94 to 128 GPa as the negative bias voltage increased from 400 to 550 V. Poisson's ratio was estimated to be about 0.22 in this bias voltage range. For the negative bias voltages less than 400 V, however, the present method resulted in negative Poisson's ratio. The limitation of the present method was discussed.

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