Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

M. O. Kim, K. Lee, H. Na, D. S. Kwon, J. Choi, J. I. Lee, D. Baek, J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph responds toward various concentration of hydrogen gas at room temperature. This micro-chemo-mechanical sensor reacted to 0.5% of hydrogen gas within 12 seconds and showed detection limit as low as 0.05%. It is much lower value than typical resistive-type chemo-mechanical hydrogen sensors.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2576-2579
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Kim, M. O., Lee, K., Na, H., Kwon, D. S., Choi, J., Lee, J. I., Baek, D., & Kim, J. (2013). Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2576-2579). [6627332] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627332