Abstract
Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.
| Original language | English |
|---|---|
| Pages (from-to) | 6051-6056 |
| Number of pages | 6 |
| Journal | International Journal of Modern Physics B |
| Volume | 22 |
| Issue number | 31-32 |
| Publication status | Published - 2008 Dec 30 |
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All Science Journal Classification (ASJC) codes
- Statistical and Nonlinear Physics
- Condensed Matter Physics
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Micro forming of glass microlens array using an imprinted and sintered tungsten carbide micro mold. / Han, Jeongwon; Min, Byung-Kwon; Kang, Shinill.
In: International Journal of Modern Physics B, Vol. 22, No. 31-32, 30.12.2008, p. 6051-6056.Research output: Contribution to journal › Article
TY - JOUR
T1 - Micro forming of glass microlens array using an imprinted and sintered tungsten carbide micro mold
AU - Han, Jeongwon
AU - Min, Byung-Kwon
AU - Kang, Shinill
PY - 2008/12/30
Y1 - 2008/12/30
N2 - Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.
AB - Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.
UR - http://www.scopus.com/inward/record.url?scp=62249194044&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=62249194044&partnerID=8YFLogxK
M3 - Article
VL - 22
SP - 6051
EP - 6056
JO - International Journal of Modern Physics B
JF - International Journal of Modern Physics B
SN - 0217-9792
IS - 31-32
ER -