Micro forming of glass microlens array using an imprinted and sintered tungsten carbide micro mold

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Abstract

Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.

Original languageEnglish
Pages (from-to)6051-6056
Number of pages6
JournalInternational Journal of Modern Physics B
Volume22
Issue number31-32
Publication statusPublished - 2008 Dec 30

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All Science Journal Classification (ASJC) codes

  • Statistical and Nonlinear Physics
  • Condensed Matter Physics

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