TY - JOUR
T1 - Micro forming of glass microlens array using an imprinted and sintered tungsten carbide micro mold
AU - Han, Jeongwon
AU - Min, Byung Kwon
AU - Kang, Shinill
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2008/12/30
Y1 - 2008/12/30
N2 - Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.
AB - Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.
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U2 - 10.1142/s021797920805156x
DO - 10.1142/s021797920805156x
M3 - Article
AN - SCOPUS:62249194044
VL - 22
SP - 6051
EP - 6056
JO - International Journal of Modern Physics B
JF - International Journal of Modern Physics B
SN - 0217-9792
IS - 31-32
ER -