Micro forming of glass microlens array using an imprinted and sintered tungsten carbide micro mold

Glass microlens array with lens diameter under 100 m was replicated by micro thermal forming process using a tungsten carbide micro mold which was imprinted and sintered from an original master. The original master was fabricated by photolithography and thermal reflow process. The effects of forming process conditions on the form accuracy and the surface roughness of the micro formed glass microlens array were examined and analyzed. Finally, to verify the effectiveness of the proposed process, glass microlens array for the purpose of laser beam focusing was designed and fabricated, and a focused laser beam profile using the fabricated microlens array was measured and analyzed.