Micro-patterning of silicon by frictional interaction and chemical reaction

Dae Eun Kim, Jae Joon Yi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this paper a novel and economical method of generating three-dimensional micropatterns on single crystal silicon without the need for a mask is presented. The technique is based on the fundamental understanding of frictional interaction at light loads. Micro-patterning is done through a two-step process that comprises mechanical scribing and chemical etching. The basic idea is to induce micro-plastic deformation along a prescribed track through frictional interaction between the tool and the workpiece. Then, by exposing the surface to a chemical under controlled conditions, preferential chemical reaction is induced along the track to form hillocks about 5 pm wide and 1 pm high. This method of micro-machining may be used for making patterns in micro-electro-mechanical systems (MEMS) at low cost. Furthermore, this process demonstrates how microtribological processes can be utilized in the fabrication of micro-structures.

Original languageEnglish
Pages (from-to)353-357
Number of pages5
JournalJournal of Tribology
Volume120
Issue number2
DOIs
Publication statusPublished - 1998 Jan 1

Fingerprint

Silicon
Masks
Chemical reactions
Etching
Plastic deformation
chemical reactions
Machining
Single crystals
Fabrication
Microstructure
scoring
silicon
machining
plastic deformation
Costs
masks
etching
interactions
microstructure
fabrication

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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Micro-patterning of silicon by frictional interaction and chemical reaction. / Kim, Dae Eun; Yi, Jae Joon.

In: Journal of Tribology, Vol. 120, No. 2, 01.01.1998, p. 353-357.

Research output: Contribution to journalArticle

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