Micro-sized pH sensors based on patterned Pd structures using an electrolysis method

Young Tack Lee, Eunsongyi Lee, Jun Min Lee, Wooyoung Lee

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5 Citations (Scopus)


We report a novel low-cost and simple technique to fabricate micron-scaled pH sensors using Pd patterned structures. We utilized a combination of photolithography and a lift-off technique to fabricate a V-shaped 4-probe device from a continuous Pd film. The device could detect the pH of a buffer solution by electrolysis. The hydrogen gas (H2) in the solution generated during electrolysis was sensed by the Pd structure. Our results demonstrate that micron-scaled pH sensors based on V-shaped Pd structures can be used to quantitatively detect the pH of a wide pH range of buffer solutions.

Original languageEnglish
Pages (from-to)e218-e221
JournalCurrent Applied Physics
Issue number4 SUPPL.
Publication statusPublished - 2009 Jul 1


All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

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