Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering

Hae Suk Jung, Hyung Ho Park

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The growth and structural evolution of carbon nitride (CNx) films, deposited by nitrogen ion beam assisted magnetron sputtering, were studied. The deposition rate, composition ([N]/[C] ratio), structure, and mechanical properties of CNx films were investigated as a function of nitrogen ion energy in the range of 30 eV-1 keV. For the ion energy below 200 eV, the increasing fraction of curved structure as revealed by transmission electron microscopy and sp3 hybridized bonding were attributed to structural transition and improved mechanical properties of CNx films. However, when increasing nitrogen ion energy above 200 eV, the [N]/[C] ratio in film was inversely proportional to the nitrogen ion energy and preferential distribution of nitrogen in sp2 hybridized site induced the retransition from curved structure to planar structure. From these results, it was found that CNx films exhibit two different structural and bonding characteristics with ion energy and this transition of film characteristics is closely related to the nitrogen content in the film.

Original languageEnglish
Pages (from-to)1205-1209
Number of pages5
JournalDiamond and Related Materials
Volume11
Issue number3-6
DOIs
Publication statusPublished - 2002 Mar 1

Fingerprint

carbon nitrides
Carbon nitride
structural analysis
Structural analysis
Magnetron sputtering
Ion beams
magnetron sputtering
ion beams
Nitrogen
nitrogen ions
Ions
mechanical properties
nitrogen
Mechanical properties
energy
planar structures
cyanogen
Deposition rates
energy distribution
ions

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

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abstract = "The growth and structural evolution of carbon nitride (CNx) films, deposited by nitrogen ion beam assisted magnetron sputtering, were studied. The deposition rate, composition ([N]/[C] ratio), structure, and mechanical properties of CNx films were investigated as a function of nitrogen ion energy in the range of 30 eV-1 keV. For the ion energy below 200 eV, the increasing fraction of curved structure as revealed by transmission electron microscopy and sp3 hybridized bonding were attributed to structural transition and improved mechanical properties of CNx films. However, when increasing nitrogen ion energy above 200 eV, the [N]/[C] ratio in film was inversely proportional to the nitrogen ion energy and preferential distribution of nitrogen in sp2 hybridized site induced the retransition from curved structure to planar structure. From these results, it was found that CNx films exhibit two different structural and bonding characteristics with ion energy and this transition of film characteristics is closely related to the nitrogen content in the film.",
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Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering. / Jung, Hae Suk; Park, Hyung Ho.

In: Diamond and Related Materials, Vol. 11, No. 3-6, 01.03.2002, p. 1205-1209.

Research output: Contribution to journalArticle

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AB - The growth and structural evolution of carbon nitride (CNx) films, deposited by nitrogen ion beam assisted magnetron sputtering, were studied. The deposition rate, composition ([N]/[C] ratio), structure, and mechanical properties of CNx films were investigated as a function of nitrogen ion energy in the range of 30 eV-1 keV. For the ion energy below 200 eV, the increasing fraction of curved structure as revealed by transmission electron microscopy and sp3 hybridized bonding were attributed to structural transition and improved mechanical properties of CNx films. However, when increasing nitrogen ion energy above 200 eV, the [N]/[C] ratio in film was inversely proportional to the nitrogen ion energy and preferential distribution of nitrogen in sp2 hybridized site induced the retransition from curved structure to planar structure. From these results, it was found that CNx films exhibit two different structural and bonding characteristics with ion energy and this transition of film characteristics is closely related to the nitrogen content in the film.

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