Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon

Yong Sik Kim; Koo Hyun Chung; Dae Eun Kim

doi:10.1109/APMRC.2004.1521967

Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon

Yong Sik Kim, Koo Hyun Chung, Dae Eun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.

Original language	English
Title of host publication	Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	93-94
Number of pages	2
ISBN (Electronic)	0780387171, 9780780387171
DOIs	https://doi.org/10.1109/APMRC.2004.1521967
Publication status	Published - 2004
Event	2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004 - Seoul, Korea, Republic of Duration: 2004 Aug 16 → 2004 Aug 19

Publication series

Name	Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004

Other

Other	2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004
Country	Korea, Republic of
City	Seoul
Period	04/8/16 → 04/8/19

Bibliographical note

Publisher Copyright:
© 2004 IEEE.

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

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10.1109/APMRC.2004.1521967

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Kim, Y. S., Chung, K. H., & Kim, D. E. (2004). Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. In Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004 (pp. 93-94). [1521967] (Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APMRC.2004.1521967

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abstract = "The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.",

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Kim, YS, Chung, KH & Kim, DE 2004, Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. in Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004., 1521967, Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004, Institute of Electrical and Electronics Engineers Inc., pp. 93-94, 2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004, Seoul, Korea, Republic of, 04/8/16. https://doi.org/10.1109/APMRC.2004.1521967

Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. / Kim, Yong Sik; Chung, Koo Hyun; Kim, Dae Eun.

Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004. Institute of Electrical and Electronics Engineers Inc., 2004. p. 93-94 1521967 (Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.

AB - The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.

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Kim YS, Chung KH, Kim DE. Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. In Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004. Institute of Electrical and Electronics Engineers Inc. 2004. p. 93-94. 1521967. (Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004). https://doi.org/10.1109/APMRC.2004.1521967

Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon

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