Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon

Yong Sik Kim, Koo Hyun Chung, Dae Eun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.

Original languageEnglish
Title of host publicationAsia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages93-94
Number of pages2
ISBN (Electronic)0780387171, 9780780387171
DOIs
Publication statusPublished - 2004 Jan 1
Event2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004 - Seoul, Korea, Republic of
Duration: 2004 Aug 162004 Aug 19

Publication series

NameAsia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004

Other

Other2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004
CountryKorea, Republic of
CitySeoul
Period04/8/1604/8/19

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Kim, Y. S., Chung, K. H., & Kim, D. E. (2004). Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. In Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004 (pp. 93-94). [1521967] (Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APMRC.2004.1521967