Abstract
The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.
| Original language | English |
|---|---|
| Title of host publication | Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 93-94 |
| Number of pages | 2 |
| ISBN (Electronic) | 0780387171, 9780780387171 |
| DOIs | |
| Publication status | Published - 2004 Jan 1 |
| Event | 2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004 - Seoul, Korea, Republic of Duration: 2004 Aug 16 → 2004 Aug 19 |
Publication series
| Name | Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004 |
|---|
Other
| Other | 2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004 |
|---|---|
| Country | Korea, Republic of |
| City | Seoul |
| Period | 04/8/16 → 04/8/19 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
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Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon. / Kim, Yong Sik; Chung, Koo Hyun; Kim, Dae Eun.
Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004. Institute of Electrical and Electronics Engineers Inc., 2004. p. 93-94 1521967 (Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Micro-tribological characteristics of PFPE Zdol lubricant coated on silicon
AU - Kim, Yong Sik
AU - Chung, Koo Hyun
AU - Kim, Dae Eun
PY - 2004/1/1
Y1 - 2004/1/1
N2 - The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.
AB - The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.
UR - http://www.scopus.com/inward/record.url?scp=84934284269&partnerID=8YFLogxK
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U2 - 10.1109/APMRC.2004.1521967
DO - 10.1109/APMRC.2004.1521967
M3 - Conference contribution
AN - SCOPUS:84934284269
T3 - Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004
SP - 93
EP - 94
BT - Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004
PB - Institute of Electrical and Electronics Engineers Inc.
ER -