The reliability problem is crucial in micro-systems. In order to increase the reliability and durability, new lubrication is needed since conventional lubricant cannot be used in the micro-system. In this work, the fundamental tribological characteristics of perfluoropolyether (PFPE) Fomblin Zdol lubricants with different thickness coated on silicon by dip coating method were investigated. The Zdol lubricant was characterized by ellipsometry, contact angle measurement, X-ray Photoelectron Spectroscopy (XPS), and Atomic Force Microscope (AFM). Especially, characteristics of unbonded Zdol films were compared with that of bonded Zdol films from the view point of stiction and friction. As a result, optimum thickness of unbonded as well as bonded Zdol film was proposed. Also, it was found that the Zdol films with only bonded fraction had lower stiction/friction coefficient than the Zdol film with unbonded and bonded fraction.
|Title of host publication||Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||2|
|ISBN (Electronic)||0780387171, 9780780387171|
|Publication status||Published - 2004|
|Event||2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004 - Seoul, Korea, Republic of|
Duration: 2004 Aug 16 → 2004 Aug 19
|Name||Asia-Pacific Magnetic Recording Conference 2004, Digest of APMRC 2004|
|Other||2004 Asia-Pacific Magnetic Recording Conference, APMRC 2004|
|Country||Korea, Republic of|
|Period||04/8/16 → 04/8/19|
Bibliographical notePublisher Copyright:
© 2004 IEEE.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering