Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation

Eunhwan Jo; Yunsung Kang; Sangjun Sim; Jungwook Choi; Jongbaeg Kim

doi:10.1109/MEMS46641.2020.9056285

Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation

Eunhwan Jo, Yunsung Kang, Sangjun Sim, Jungwook Choi, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	574-577
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056285
Publication status	Published - 2020 Jan
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 2020 Jan 18 → 2020 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	20/1/18 → 20/1/22

Bibliographical note

Funding Information:
This research was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070).

Publisher Copyright:
© 2020 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS46641.2020.9056285

Cite this

Jo, E., Kang, Y., Sim, S., Choi, J., & Kim, J. (2020). Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 574-577). [9056285] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056285

Jo, Eunhwan ; Kang, Yunsung ; Sim, Sangjun et al. / Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 574-577 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation",

abstract = "This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.",

author = "Eunhwan Jo and Yunsung Kang and Sangjun Sim and Jungwook Choi and Jongbaeg Kim",

note = "Funding Information: This research was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070). Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",

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doi = "10.1109/MEMS46641.2020.9056285",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Jo, E, Kang, Y, Sim, S, Choi, J & Kim, J 2020, Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056285, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 574-577, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 20/1/18. https://doi.org/10.1109/MEMS46641.2020.9056285

Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation. / Jo, Eunhwan; Kang, Yunsung; Sim, Sangjun et al.

33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 574-577 9056285 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N1 - Funding Information: This research was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070). Publisher Copyright: © 2020 IEEE.

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N2 - This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.

AB - This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.

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Jo E, Kang Y, Sim S, Choi J, Kim J. Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 574-577. 9056285. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056285

Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation

Abstract

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Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

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