This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.
|Title of host publication||33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2020 Jan|
|Event||33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada|
Duration: 2020 Jan 18 → 2020 Jan 22
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Conference||33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020|
|Period||20/1/18 → 20/1/22|
Bibliographical noteFunding Information:
This research was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070).
© 2020 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering