We present a portable, inexpensive, and accurate microelectromechanical-system-based (MEMS-based) condensation particle counter (CPC) for sensitive and precise monitoring of airborne ultrafine particles (UFPs) at a point of interest. A MEMS-based CPC consists of two main parts: a MEMS-based condensation chip that grows UFPs to micro-sized droplets and a miniature optical particle counter (OPC) that counts single grown droplets with the light scattering method. A conventional conductive cooling-type CPC is miniaturized through MEMS technology and three-dimensional (3-D) printing techniques; the essential elements for growing droplets are integrated on a single glass slide. Our system is much more compact (75 mm×130 mm×50 mm), lightweight (205 g), and power-efficient (2.7 W) than commercial CPCs. In quantitative experiments, the results indicated that our system could detect UFPs with a diameter of 12.9 nm by growing them to micro-sized (3.1 μm) droplets. Our system measured the UFP number concentration with high accuracy (mean difference within 4.1 %), and the number concentration range for which our system can count single particles is 7.99-6850 cm-3. Thus, our system has the potential to be used for UFP monitoring in various environments (e.g., as an air filtration system, in high-precision industries utilizing clean rooms, and in indoor and outdoor atmospheres).
Bibliographical noteFunding Information:
Acknowledgements. This work was supported by the Samsung Research Funding & Incubation Center of Samsung Electronics (grant no. SRFC-TA1803-05) and by the Technology Innovation Program (grant no. 10077651, Development of IoT fusion sensor system based on artificial intelligence) funded by the Ministry of Trade, Industry and Energy (MOTIE, Republic of Korea).
Financial support. This work was supported by the Samsung Research Funding & Incubation Center of Samsung Electronics under Project Number SRFC-TA1803-05. This material is based upon work supported by the Ministry of Trade, Industry and Energy (MOTIE, Republic of Korea) under Industrial Technology Innovation Program Number 10077651.
© Author(s) 2019.
All Science Journal Classification (ASJC) codes
- Atmospheric Science