Microfabricated torsional actuator using self-aligned plastic deformation

Jongbaeg Kim, Hyuck Choo, Liwei Lin, R. S. Muller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)

Abstract

We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1015-1018
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Kim, J., Choo, H., Lin, L., & Muller, R. S. (2003). Microfabricated torsional actuator using self-aligned plastic deformation. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1015-1018). [1216940] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216940