Abstract
We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1015-1018 |
| Number of pages | 4 |
| ISBN (Electronic) | 0780377311, 9780780377318 |
| DOIs | |
| Publication status | Published - 2003 Jan 1 |
| Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Publication series
| Name | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
|---|---|
| Volume | 2 |
Other
| Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
|---|---|
| Country | United States |
| City | Boston |
| Period | 03/6/8 → 03/6/12 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
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Microfabricated torsional actuator using self-aligned plastic deformation. / Kim, Jongbaeg; Choo, Hyuck; Lin, Liwei; Muller, R. S.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1015-1018 1216940 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Microfabricated torsional actuator using self-aligned plastic deformation
AU - Kim, Jongbaeg
AU - Choo, Hyuck
AU - Lin, Liwei
AU - Muller, R. S.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.
AB - We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.
UR - http://www.scopus.com/inward/record.url?scp=42549129576&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=42549129576&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2003.1216940
DO - 10.1109/SENSOR.2003.1216940
M3 - Conference contribution
AN - SCOPUS:42549129576
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 1015
EP - 1018
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
ER -