Abstract
We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.
Original language | English |
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Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1015-1018 |
Number of pages | 4 |
ISBN (Electronic) | 0780377311, 9780780377318 |
DOIs | |
Publication status | Published - 2003 |
Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Publication series
Name | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
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Volume | 2 |
Other
Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
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Country/Territory | United States |
City | Boston |
Period | 03/6/8 → 03/6/12 |
Bibliographical note
Publisher Copyright:© 2003 IEEE.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering