Microfabricated torsional actuator using self-aligned plastic deformation

Jongbaeg Kim; Hyuck Choo; Liwei Lin; R. S. Muller

doi:10.1109/SENSOR.2003.1216940

Microfabricated torsional actuator using self-aligned plastic deformation

Jongbaeg Kim, Hyuck Choo, Liwei Lin, R. S. Muller

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

18 Citations (Scopus)

Abstract

We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 V_dc plus 13 V_ac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1015-1018
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1216940
Publication status	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country	United States
City	Boston
Period	03/6/8 → 03/6/12

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1216940

Fingerprint Dive into the research topics of 'Microfabricated torsional actuator using self-aligned plastic deformation'. Together they form a unique fingerprint.

Cite this

Kim, J., Choo, H., Lin, L., & Muller, R. S. (2003). Microfabricated torsional actuator using self-aligned plastic deformation. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1015-1018). [1216940] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216940

Kim, Jongbaeg ; Choo, Hyuck ; Lin, Liwei ; Muller, R. S. / Microfabricated torsional actuator using self-aligned plastic deformation. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1015-1018 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{cd69b7d22ee642fb8ce84e15dc59b07c,

title = "Microfabricated torsional actuator using self-aligned plastic deformation",

abstract = "We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.",

author = "Jongbaeg Kim and Hyuck Choo and Liwei Lin and Muller, {R. S.}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1216940",

language = "English",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1015--1018",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

address = "United States",

}

Kim, J, Choo, H, Lin, L & Muller, RS 2003, Microfabricated torsional actuator using self-aligned plastic deformation. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216940, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1015-1018, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1216940

Microfabricated torsional actuator using self-aligned plastic deformation. / Kim, Jongbaeg; Choo, Hyuck; Lin, Liwei; Muller, R. S.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1015-1018 1216940 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Microfabricated torsional actuator using self-aligned plastic deformation

AU - Kim, Jongbaeg

AU - Choo, Hyuck

AU - Lin, Liwei

AU - Muller, R. S.

PY - 2003

Y1 - 2003

N2 - We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.

AB - We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 Vdc plus 13 Vac. After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.

UR - http://www.scopus.com/inward/record.url?scp=42549129576&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=42549129576&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2003.1216940

DO - 10.1109/SENSOR.2003.1216940

M3 - Conference contribution

AN - SCOPUS:42549129576

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1015

EP - 1018

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Kim J, Choo H, Lin L, Muller RS. Microfabricated torsional actuator using self-aligned plastic deformation. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1015-1018. 1216940. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). https://doi.org/10.1109/SENSOR.2003.1216940