Abstract
In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95 kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40 V dc plus 13V pp. After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.
| Original language | English |
|---|---|
| Pages (from-to) | 553-562 |
| Number of pages | 10 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 15 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2006 Jun 1 |
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All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
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Microfabricated torsional actuators using self-aligned plastic deformation of silicon. / Kim, Jongbaeg; Choo, Hyuck; Lin, Liwei; Muller, Richard S.
In: Journal of Microelectromechanical Systems, Vol. 15, No. 3, 01.06.2006, p. 553-562.Research output: Contribution to journal › Article
TY - JOUR
T1 - Microfabricated torsional actuators using self-aligned plastic deformation of silicon
AU - Kim, Jongbaeg
AU - Choo, Hyuck
AU - Lin, Liwei
AU - Muller, Richard S.
PY - 2006/6/1
Y1 - 2006/6/1
N2 - In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95 kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40 V dc plus 13V pp. After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.
AB - In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95 kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40 V dc plus 13V pp. After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.
UR - http://www.scopus.com/inward/record.url?scp=33745124698&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33745124698&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2006.876789
DO - 10.1109/JMEMS.2006.876789
M3 - Article
VL - 15
SP - 553
EP - 562
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 3
ER -