Micromachined electrical mobility analyzer for wide range airborne particle classification

Il Hyun Jung; Yong Ho Kim; Dongho Park; Jungho Hwang; Yong Jun Kim

doi:10.1109/MEMSYS.2008.4443719

Micromachined electrical mobility analyzer for wide range airborne particle classification

Il Hyun Jung, Yong Ho Kim, Dongho Park, Jungho Hwang, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	567-570
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443719
Publication status	Published - 2008
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443719

Cite this

Jung, I. H., Kim, Y. H., Park, D., Hwang, J., & Kim, Y. J. (2008). Micromachined electrical mobility analyzer for wide range airborne particle classification. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 567-570). [4443719] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443719

@inproceedings{65088df5d7bf4494825ae5c72ae9174d,

title = "Micromachined electrical mobility analyzer for wide range airborne particle classification",

abstract = "This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.",

author = "Jung, {Il Hyun} and Kim, {Yong Ho} and Dongho Park and Jungho Hwang and Kim, {Yong Jun}",

year = "2008",

doi = "10.1109/MEMSYS.2008.4443719",

language = "English",

isbn = "9781424417933",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "567--570",

booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",

note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

}

Jung, IH, Kim, YH, Park, D, Hwang, J & Kim, YJ 2008, Micromachined electrical mobility analyzer for wide range airborne particle classification. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443719, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 567-570, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443719

Micromachined electrical mobility analyzer for wide range airborne particle classification. / Jung, Il Hyun; Kim, Yong Ho; Park, Dongho et al.

MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 567-570 4443719 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Micromachined electrical mobility analyzer for wide range airborne particle classification

AU - Jung, Il Hyun

AU - Kim, Yong Ho

AU - Park, Dongho

AU - Hwang, Jungho

AU - Kim, Yong Jun

PY - 2008

Y1 - 2008

N2 - This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.

AB - This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.

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DO - 10.1109/MEMSYS.2008.4443719

M3 - Conference contribution

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SN - 9781424417933

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 567

EP - 570

BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems

T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson

Y2 - 13 January 2008 through 17 January 2008

ER -

Jung IH, Kim YH, Park D, Hwang J , Kim YJ. Micromachined electrical mobility analyzer for wide range airborne particle classification. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 567-570. 4443719. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443719

Micromachined electrical mobility analyzer for wide range airborne particle classification

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