Micromachined electrical mobility analyzer for wide range airborne particle classification

Il Hyun Jung, Yong Ho Kim, Dongho Park, Jungho Hwang, Yong Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages567-570
Number of pages4
DOIs
Publication statusPublished - 2008 Aug 29
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

Fingerprint

analyzers
Electric fields
Micromachining
Silicon
Microchannels
Classifiers
electric fields
micromachining
outlets
classifiers
microchannels
inertia
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Jung, I. H., Kim, Y. H., Park, D., Hwang, J., & Kim, Y. J. (2008). Micromachined electrical mobility analyzer for wide range airborne particle classification. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 567-570). [4443719] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443719
Jung, Il Hyun ; Kim, Yong Ho ; Park, Dongho ; Hwang, Jungho ; Kim, Yong Jun. / Micromachined electrical mobility analyzer for wide range airborne particle classification. MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. pp. 567-570 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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Jung, IH, Kim, YH, Park, D, Hwang, J & Kim, YJ 2008, Micromachined electrical mobility analyzer for wide range airborne particle classification. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443719, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 567-570, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443719

Micromachined electrical mobility analyzer for wide range airborne particle classification. / Jung, Il Hyun; Kim, Yong Ho; Park, Dongho; Hwang, Jungho; Kim, Yong Jun.

MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 567-570 4443719 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano-sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter of less than 50 nm, was examined using the nEMA by applying an electrical potential. For various electric field magnitude ranging from 10 to 160 V, the particle diameter collected in the outlet was measured. The collection efficiency of 40 nm particles was investigated by increasing an electric field, and it was highest at 70 V.

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Jung IH, Kim YH, Park D, Hwang J, Kim YJ. Micromachined electrical mobility analyzer for wide range airborne particle classification. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 567-570. 4443719. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443719