Micromachined filters on synthesized substrates

R. F. Drayton, S. Pacheco, J. G. Yook, L. P B Katehi

Research output: Contribution to journalConference article

11 Citations (Scopus)

Abstract

Effective frequency spectrum usage requires high performance filters with a sharp cut-off frequency and high stopband attenuation. Stepped impedance lowpass designs achieve this with large ratios of high and low impedance values. In high index materials, however, such as Si (11.7) and GaAs (12.9), these ratios are around 5 which significantly limit filter performance. This paper presents the use of Si micromachining to produce synthesized substrates with stepped-impedance low filter designs. Of the two designs, one offers a reduction of the low impedance value while the other offers an increase of the high impedance value to produce ZH/ZL ratios that are 1.5 to 2 times larger than conventional designs.

Original languageEnglish
Pages (from-to)1185-1188
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume3
Publication statusPublished - 1998 Jan 1

Fingerprint

impedance
filters
Substrates
Micromachining
Cutoff frequency
micromachining
cut-off
attenuation

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Drayton, R. F., Pacheco, S., Yook, J. G., & Katehi, L. P. B. (1998). Micromachined filters on synthesized substrates. IEEE MTT-S International Microwave Symposium Digest, 3, 1185-1188.
Drayton, R. F. ; Pacheco, S. ; Yook, J. G. ; Katehi, L. P B. / Micromachined filters on synthesized substrates. In: IEEE MTT-S International Microwave Symposium Digest. 1998 ; Vol. 3. pp. 1185-1188.
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Drayton, RF, Pacheco, S, Yook, JG & Katehi, LPB 1998, 'Micromachined filters on synthesized substrates', IEEE MTT-S International Microwave Symposium Digest, vol. 3, pp. 1185-1188.

Micromachined filters on synthesized substrates. / Drayton, R. F.; Pacheco, S.; Yook, J. G.; Katehi, L. P B.

In: IEEE MTT-S International Microwave Symposium Digest, Vol. 3, 01.01.1998, p. 1185-1188.

Research output: Contribution to journalConference article

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