In this paper, silicon micromachining has been used to demonstrate the possibility of building high performance microwave and millimeter-wave antennas. To suppress higher order substrate modes and increase the bandwidth of a patch antenna, silicon substrate has been used and material has been selectively removed under the patch area. In addition, the effect of etched grooves around a patch element has been studied for performance improvements. It has been shown that micromachined substrate structure can effectively suppress unwanted surface wave modes resulting in improved radiation efficiency. Moreover, effective dielectric constant curves for the shielded micromachined substrates are provided for accurate design of patch antennas. We have demonstrated that mutual coupling between the radiating patch elements due to surface waves can be controlled using various micromachined substrate configurations.
Bibliographical noteFunding Information:
Manuscript received August 9, 1999; revised May 15, 2000. This work was supported in part by MURI in Quasi Optical System and Office of Naval Research, by the University of Michigan Center for Parallel Computing (CPC), which is supported in part by the NSF under Grant CDA-92-14296 and the Ford Motor Company, and by the University Research Initiative Program supported by Ministry of Information and Communication (MIC) in South Korea.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering