Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration

Hong Lae Kim, Sang Myun Lee, Chul Woo Park, Jungho Hwang, Yong Jun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type discharge electrode. The discharge characteristic and particle charging capability of the proposed corona discharger were experimentally examined. At the result, the corona current and induced current by charged particles were 3 times higher than those of the tip-to-pate micro corona discharger.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages477-479
Number of pages3
DOIs
Publication statusPublished - 2013 Apr 2
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Kim, H. L., Lee, S. M., Park, C. W., Hwang, J., & Kim, Y. J. (2013). Micromachined tip-to-plate corona discharger with slit dielectric barrier for measuring the airborne particle number concentration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 477-479). [6474282] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474282