Microoptical two-dimensional devices for the optical memory head of an ultrahigh data transfer rate and density sytem using a vertical cavity surface emitting laser (VCSEL) array

Kenya Goto, Young Joo Kim, Satoshi Mitsugi, Kazuhiro Suzuki, Kazuma Kurihara, Takayuki Horibe

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The parallel optical memory system has important advantages for realizing both a fast data transfer rate and high memory capacity since it is based on multibeam recording and a smaller spot size using the vertical cavity surface emitting laser (VCSEL) and a nanoprobe array. The concept, theoretical analysis and fabrication process for the integrated VCSEL nanoprobe array head are discussed with emphasis on the micro-optical issues such as the improvement of optical efficiency by microlens focusing. The flat-tip nanoprobe structure was successfully prepared with the small metal aperture of 150 nm and 1.25% optical throughput using metal aperture Si or GaP semiconductor nano-probes. To realize better optical throughput in the integrated VCSEL, a special nanoprobe array and a microlens array were developed. The microlens array was prepared using a thermal reflow process of the photoresist and lens shape pattern transfering to the semiconductor nanoprobe bottom face by dry etching. Since this two-dimensional array system requires three-dimensional micro-optical adjustment to focus a very small spot on the recording media, this research can provide guidelines for new micro-optical components in future technology.

Original languageEnglish
Pages (from-to)4835-4840
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number7 B
Publication statusPublished - 2002 Jul 1

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Data transfer rates
Nanoprobes
Optical data storage
laser arrays
Surface emitting lasers
surface emitting lasers
cavities
apertures
recording
Throughput
Semiconductor materials
Dry etching
Photoresists
Metals
photoresists
metals
Lenses
adjusting
lenses
etching

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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abstract = "The parallel optical memory system has important advantages for realizing both a fast data transfer rate and high memory capacity since it is based on multibeam recording and a smaller spot size using the vertical cavity surface emitting laser (VCSEL) and a nanoprobe array. The concept, theoretical analysis and fabrication process for the integrated VCSEL nanoprobe array head are discussed with emphasis on the micro-optical issues such as the improvement of optical efficiency by microlens focusing. The flat-tip nanoprobe structure was successfully prepared with the small metal aperture of 150 nm and 1.25{\%} optical throughput using metal aperture Si or GaP semiconductor nano-probes. To realize better optical throughput in the integrated VCSEL, a special nanoprobe array and a microlens array were developed. The microlens array was prepared using a thermal reflow process of the photoresist and lens shape pattern transfering to the semiconductor nanoprobe bottom face by dry etching. Since this two-dimensional array system requires three-dimensional micro-optical adjustment to focus a very small spot on the recording media, this research can provide guidelines for new micro-optical components in future technology.",
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AU - Kim, Young Joo

AU - Mitsugi, Satoshi

AU - Suzuki, Kazuhiro

AU - Kurihara, Kazuma

AU - Horibe, Takayuki

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AB - The parallel optical memory system has important advantages for realizing both a fast data transfer rate and high memory capacity since it is based on multibeam recording and a smaller spot size using the vertical cavity surface emitting laser (VCSEL) and a nanoprobe array. The concept, theoretical analysis and fabrication process for the integrated VCSEL nanoprobe array head are discussed with emphasis on the micro-optical issues such as the improvement of optical efficiency by microlens focusing. The flat-tip nanoprobe structure was successfully prepared with the small metal aperture of 150 nm and 1.25% optical throughput using metal aperture Si or GaP semiconductor nano-probes. To realize better optical throughput in the integrated VCSEL, a special nanoprobe array and a microlens array were developed. The microlens array was prepared using a thermal reflow process of the photoresist and lens shape pattern transfering to the semiconductor nanoprobe bottom face by dry etching. Since this two-dimensional array system requires three-dimensional micro-optical adjustment to focus a very small spot on the recording media, this research can provide guidelines for new micro-optical components in future technology.

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