Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact

Jungwook Choi, Jae Ik Lee, Youngkee Eun, Min Ook Kim, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A microswitch based on self-assembled carbon nanotube (CNT) arrays as micromechanical contact material has been demonstrated. The aligned CNT arrays are synthesized on microelectrodes and movable shuttle fabricated on a silicon-on-insulator (SOI) wafer. The CNT arrays are self-assembled on microstructures making mechanical contact between source and shuttle, and this contact is preloaded by the growth force of CNT and mechanical restoring force of the strained springs. Based on high interfacial contact area of CNT arrays, high electrical conductivity and excellent mechanical properties of CNT, highly reliable and durable micromechanical contact for microswitch is experimentally demonstrated while high-density currents are stably transmitted.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages87-90
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Choi, J., Lee, J. I., Eun, Y., Kim, M. O., & Kim, J. (2011). Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 87-90). [5734368] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734368