Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact

Jungwook Choi; Jae Ik Lee; Youngkee Eun; Min Ook Kim; Jongbaeg Kim

doi:10.1109/MEMSYS.2011.5734368

Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact

Jungwook Choi, Jae Ik Lee, Youngkee Eun, Min Ook Kim, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

A microswitch based on self-assembled carbon nanotube (CNT) arrays as micromechanical contact material has been demonstrated. The aligned CNT arrays are synthesized on microelectrodes and movable shuttle fabricated on a silicon-on-insulator (SOI) wafer. The CNT arrays are self-assembled on microstructures making mechanical contact between source and shuttle, and this contact is preloaded by the growth force of CNT and mechanical restoring force of the strained springs. Based on high interfacial contact area of CNT arrays, high electrical conductivity and excellent mechanical properties of CNT, highly reliable and durable micromechanical contact for microswitch is experimentally demonstrated while high-density currents are stably transmitted.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	87-90
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734368
Publication status	Published - 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2011.5734368

Cite this

Choi, J., Lee, J. I., Eun, Y., Kim, M. O., & Kim, J. (2011). Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 87-90). [5734368] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734368

@inproceedings{ab7a25036d974cb6a0254be1ed8855b3,

title = "Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact",

abstract = "A microswitch based on self-assembled carbon nanotube (CNT) arrays as micromechanical contact material has been demonstrated. The aligned CNT arrays are synthesized on microelectrodes and movable shuttle fabricated on a silicon-on-insulator (SOI) wafer. The CNT arrays are self-assembled on microstructures making mechanical contact between source and shuttle, and this contact is preloaded by the growth force of CNT and mechanical restoring force of the strained springs. Based on high interfacial contact area of CNT arrays, high electrical conductivity and excellent mechanical properties of CNT, highly reliable and durable micromechanical contact for microswitch is experimentally demonstrated while high-density currents are stably transmitted.",

author = "Jungwook Choi and Lee, {Jae Ik} and Youngkee Eun and Kim, {Min Ook} and Jongbaeg Kim",

year = "2011",

doi = "10.1109/MEMSYS.2011.5734368",

language = "English",

isbn = "9781424496327",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "87--90",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

}

Choi, J, Lee, JI, Eun, Y, Kim, MO & Kim, J 2011, Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734368, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 87-90, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734368

Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact. / Choi, Jungwook; Lee, Jae Ik; Eun, Youngkee et al.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 87-90 5734368 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - A microswitch based on self-assembled carbon nanotube (CNT) arrays as micromechanical contact material has been demonstrated. The aligned CNT arrays are synthesized on microelectrodes and movable shuttle fabricated on a silicon-on-insulator (SOI) wafer. The CNT arrays are self-assembled on microstructures making mechanical contact between source and shuttle, and this contact is preloaded by the growth force of CNT and mechanical restoring force of the strained springs. Based on high interfacial contact area of CNT arrays, high electrical conductivity and excellent mechanical properties of CNT, highly reliable and durable micromechanical contact for microswitch is experimentally demonstrated while high-density currents are stably transmitted.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Choi J, Lee JI, Eun Y, Kim MO, Kim J. Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 87-90. 5734368. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2011.5734368

Microswitch with self-assembled carbon nanotube arrays for high current density and reliable contact

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