Modeling and initial growth mode of ultrathin film on the basis of electrical conductivity of substrate

Seok Kyun Song, Seok Keun Koh, Deuk Yeon Lee, Kie Moon Song, Hong Koo Baik

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A model for the electrical conductance of a semiconductive substrate with an average thickness is proposed for a region of initial growth before the appearance of a tunneling effect. Based on this model, we propose 6 different growth modes according to the film thickness, measuring in situ electrical conductivity. As the film thickness increased, the island size was constant and then increased, while the number of islands first increased and then decreased. The proposed model may be useful for in situ study of the growth of ultrathin films prior to the onset of tunneling conductance.

Original languageEnglish
Pages (from-to)6452-6456
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number9 A
Publication statusPublished - 2004 Sep 1


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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