Modeling growth rate of HfO2 thin films grown by metal-organic molecular beam epitaxy

Myoung Seok Kim, Young Don Ko, Tae Houng Moon, Jae Min Myoung, Ilgu Yun

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Modeling growth rate of HfO<sub>2</sub> thin films grown by metal-organic molecular beam epitaxy'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds