Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system

In Joong Kim, Yong Hyeon Shin, Ilgu Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Based on a measurable range of optical emission spectroscopy (OES), the modeling of plasma characteristic is investigated depending on the position of incident angle of OES. In this work, OES is installed in the viewpoint of the plasma assisted atomic layer deposition (PA-ALD) system and plasma characteristic is measured using OES. For the enhancement to obtain the plasma characteristic information, the measurement scheme by inserting body tube in front of optical fiber is developed to receive the limited light of plasma. Since a normal optical fiber is not possible to measure plasma uniformity, the proposed scheme can measure a gap of plasma intensity for each region of a wafer. The detailed analytic model is developed by using the analysis between the plasma intensity and the characteristic of PA-ALD. This scheme can allow us to improve the accuracy of a plasma diagnosis, the detection capability of plasma abnormality and the manufacturability.

Original languageEnglish
Title of host publicationICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages638-641
Number of pages4
ISBN (Electronic)9784904090138
DOIs
Publication statusPublished - 2015 Jan 1
Event2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015 - Kyoto, Japan
Duration: 2015 Apr 142015 Apr 17

Other

Other2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015
CountryJapan
CityKyoto
Period15/4/1415/4/17

Fingerprint

Optical emission spectroscopy
Atomic layer deposition
Plasmas
Optical fibers

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Kim, I. J., Shin, Y. H., & Yun, I. (2015). Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system. In ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (pp. 638-641). [7111092] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEP-IAAC.2015.7111092
Kim, In Joong ; Shin, Yong Hyeon ; Yun, Ilgu. / Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system. ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 638-641
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abstract = "Based on a measurable range of optical emission spectroscopy (OES), the modeling of plasma characteristic is investigated depending on the position of incident angle of OES. In this work, OES is installed in the viewpoint of the plasma assisted atomic layer deposition (PA-ALD) system and plasma characteristic is measured using OES. For the enhancement to obtain the plasma characteristic information, the measurement scheme by inserting body tube in front of optical fiber is developed to receive the limited light of plasma. Since a normal optical fiber is not possible to measure plasma uniformity, the proposed scheme can measure a gap of plasma intensity for each region of a wafer. The detailed analytic model is developed by using the analysis between the plasma intensity and the characteristic of PA-ALD. This scheme can allow us to improve the accuracy of a plasma diagnosis, the detection capability of plasma abnormality and the manufacturability.",
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Kim, IJ, Shin, YH & Yun, I 2015, Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system. in ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference., 7111092, Institute of Electrical and Electronics Engineers Inc., pp. 638-641, 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015, Kyoto, Japan, 15/4/14. https://doi.org/10.1109/ICEP-IAAC.2015.7111092

Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system. / Kim, In Joong; Shin, Yong Hyeon; Yun, Ilgu.

ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc., 2015. p. 638-641 7111092.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kim IJ, Shin YH, Yun I. Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system. In ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc. 2015. p. 638-641. 7111092 https://doi.org/10.1109/ICEP-IAAC.2015.7111092