Modification of GaAs and copper surface by the formation of SiO 2 aerogel film as an interlayer dielectric

Sung Woo Park, Sang Bae Jung, Min Gu Kang, Hyung Ho Park, Hae Cheon Kim

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy