Molecular beam epitaxy of large-area SnSe2 with monolayer thickness fluctuation

Young Woon Park, Sahng Kyoon Jerng, Jae Ho Jeon, Sanjib Baran Roy, Kamran Akbar, Jeong Kim, Yumin Sim, Maeng Je Seong, Jung Hwa Kim, Zonghoon Lee, Minju Kim, Yeonjin Yi, Jinwoo Kim, Do Young Noh, Seung Hyun Chun

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29 Citations (Scopus)


The interest in layered materials is largely based on the expectation that they will be beneficial for a variety of applications, from low-power-consuming, wearable electronics to energy harvesting. However, the properties of layered materials are highly dependent on thickness, and the difficulty of controlling thickness over a large area has been a bottleneck for commercial applications. Here, we report layer-by-layer growth of SnSe2, a layered semiconducting material, via van der Waals epitaxy. The films were fabricated on insulating mica substrates with substrate temperatures in the range of 210°C-370°C. The surface consists of a mixture of N and (N ± 1) layers, showing that the thickness of the film can be defined with monolayer accuracy (±0.6 nm). High-resolution transmission electron microscopy reveals a polycrystalline film with a grain size of ∼100 nm and clear Moiré patterns from overlapped grains with similar thickness. We also report field effect mobility values of 3.7 cm2 V-1 s-1 and 6.7 cm2 V-1 s-1 for 11 and 22 nm thick SnSe2, respectively. SnSe2 films with customizable thickness can provide valuable platforms for industry and academic researchers to fully exploit the potential of layered materials.

Original languageEnglish
Article number014006
Journal2D Materials
Issue number1
Publication statusPublished - 2017 Mar 1

Bibliographical note

Funding Information:
This research was supported by the National Research Foundation of Korea (NRF), funded by the Ministry of Science, ICT and Future Planning (Grant Nos. 2010-0020207, 2011-0030786, 2012M3A7B4049888, 2013R1A1A2008285, 2014R1A2A2A01005963, 2015R1A2A2A01006992, 2015R1A5A1009962, and 2016R1A2B4007367). This work was partially supported by an Industry-Academy joint research programme between Samsung Electronics and Yonsei University.

Publisher Copyright:
© 2016 IOP Publishing Ltd.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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