Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Jongbaeg Kim; Dane Christensen; Liwei Lin

doi:10.1109/LPT.2005.857612

Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Jongbaeg Kim, Dane Christensen, Liwei Lin

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 V_dc plus 15 V_pp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.

Original language	English
Pages (from-to)	2307-2309
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	17
Issue number	11
DOIs	https://doi.org/10.1109/LPT.2005.857612
Publication status	Published - 2005 Nov

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2005.857612

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title = "Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives",

abstract = "We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 Vdc plus 15 Vpp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.",

author = "Jongbaeg Kim and Dane Christensen and Liwei Lin",

year = "2005",

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AU - Christensen, Dane

AU - Lin, Liwei

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AB - We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 Vdc plus 15 Vpp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.

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JO - IEEE Photonics Technology Letters

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Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Abstract

All Science Journal Classification (ASJC) codes

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