Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Jongbaeg Kim, Dane Christensen, Liwei Lin

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 Vdc plus 15 Vpp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.

Original languageEnglish
Pages (from-to)2307-2309
Number of pages3
JournalIEEE Photonics Technology Letters
Volume17
Issue number11
DOIs
Publication statusPublished - 2005 Nov 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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