Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Jongbaeg Kim, Dane Christensen, Liwei Lin

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 Vdc plus 15 Vpp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.

Original languageEnglish
Pages (from-to)2307-2309
Number of pages3
JournalIEEE Photonics Technology Letters
Volume17
Issue number11
DOIs
Publication statusPublished - 2005 Nov 1

Fingerprint

Mirrors
mirrors
Scanning
scanning
Silicon
Masks
Electrostatics
Natural frequencies
Plastic deformation
plastic deformation
resonant frequencies
Electric potential
masks
degrees of freedom
insulators
wafers
electrostatics
cycles
electric potential
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Kim, Jongbaeg ; Christensen, Dane ; Lin, Liwei. / Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives. In: IEEE Photonics Technology Letters. 2005 ; Vol. 17, No. 11. pp. 2307-2309.
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Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives. / Kim, Jongbaeg; Christensen, Dane; Lin, Liwei.

In: IEEE Photonics Technology Letters, Vol. 17, No. 11, 01.11.2005, p. 2307-2309.

Research output: Contribution to journalArticle

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