Abstract
A multi-jet atmospheric glow plasma system with the radio frequency generated hollow cathodes was used for the PCB desmear process which operated in atmospheric pressure. The electrode comprises 100 hollow cathodes with flowing gas and the distance of both electrodes was adjustable between 1 and 10 mm. As a result, the multi-jet atmospheric glow plasma source may substantially save coats by avoiding investment of the vacuum equipment and may bring a number of interesting applications in large area cold atmospheric plasma processing.
| Original language | English |
|---|---|
| Pages (from-to) | 146 |
| Number of pages | 1 |
| Journal | IEEE International Conference on Plasma Science |
| Publication status | Published - 2002 |
| Event | 2002 IEEE International Conference on plasma Science - Banff, Alta., Canada Duration: 2002 May 26 → 2002 May 30 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering