Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene

Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Chad A. Mirkin

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Scanning probe instruments have expanded beyond their traditional role as imaging or "reading" tools and are now routinely used for "writing." Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used. Additionally, throughput is a major concern for serial writing techniques, so for a scanning probe lithography technique to become widely applied, there needs to be a reasonable path toward a scalable architecture. Here, we use a multilayer graphene coating method to create multifunctional massively parallel probe arrays that have wear-resistant tips of uncompromised sharpness and high electrical and thermal conductivities. The optical transparency and mechanical flexibility of graphene allow this procedure to be used for coating exceptionally large, cantilever-free arrays that can pattern with electrochemical desorption and thermal, in addition to conventional, dip-pen nanolithography.

Original languageEnglish
Pages (from-to)18312-18317
Number of pages6
JournalProceedings of the National Academy of Sciences of the United States of America
Volume109
Issue number45
DOIs
Publication statusPublished - 2012 Nov 6

All Science Journal Classification (ASJC) codes

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