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Dive into the research topics of 'N-doped Al<sub>2</sub>O<sub>3</sub> thin films deposited by atomic layer deposition'. Together they form a unique fingerprint.
Engineering & Materials Science
Atomic layer deposition
Aluminum oxide
Thin films
Doping (additives)
Nitrogen
Oxygen
Leakage currents
Spectroscopic analysis
Film growth
Photoelectrons
Defects
Temperature
Surface morphology
Electric properties
X rays
Surface roughness
Chemical Compounds
Atomic layer deposition
Aluminum oxide
Thin films
Doping (additives)
Nitrogen
Oxygen
Leakage currents
Spectroscopic analysis
Film growth
Photoelectrons
Defects
Temperature
Surface morphology
Electric properties
X rays
Surface roughness
Physics & Astronomy
atomic layer epitaxy
nitrogen
oxygen
leakage
thin films
spectroscopic analysis
defects
photoelectrons
temperature
surface roughness
electrical properties
x rays