TY - GEN
T1 - Nano patterning with a single high-transmission nano-metal aperture system
AU - Kim, Yongwoo
AU - Park, Sinjeung
AU - Lee, Eungman
AU - Hahn, Jae W.
PY - 2008
Y1 - 2008
N2 - We design a C-shaped aperture which overcomes the diffraction limit of light to produce a high-brightness nano-size light spot. For optical nano lithography, we construct a nano patterning system using an optical probe which adopts a solid immersion lens (SIL), the 120 nm thickness aluminum film on the bottom surface of the SIL and the C-shaped aperture engraved in the metal film. Light source is a diode laser of 405nm wavelength to expose h-line photoresist(PR). A linear stage holding the optical probe makes the nano aperture contact with the PR coated on silicon wafer. Using this patterning system, we obtain sub 100nm array patterns and measure the system performance in various exposure conditions to verify the feasibility of plasmonic lithography.
AB - We design a C-shaped aperture which overcomes the diffraction limit of light to produce a high-brightness nano-size light spot. For optical nano lithography, we construct a nano patterning system using an optical probe which adopts a solid immersion lens (SIL), the 120 nm thickness aluminum film on the bottom surface of the SIL and the C-shaped aperture engraved in the metal film. Light source is a diode laser of 405nm wavelength to expose h-line photoresist(PR). A linear stage holding the optical probe makes the nano aperture contact with the PR coated on silicon wafer. Using this patterning system, we obtain sub 100nm array patterns and measure the system performance in various exposure conditions to verify the feasibility of plasmonic lithography.
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U2 - 10.1117/12.774485
DO - 10.1117/12.774485
M3 - Conference contribution
AN - SCOPUS:79959336041
SN - 9780819471062
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Emerging Lithographic Technologies XII
T2 - Emerging Lithographic Technologies XII
Y2 - 26 February 2008 through 28 February 2008
ER -