Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Koo Hyun Chung, Yong Ha Lee, Young Tae Kim, Dae Eun Kim, Jingyoo Yoo, Seungbum Hong

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

Original languageEnglish
Pages (from-to)7983-7991
Number of pages9
JournalSurface and Coatings Technology
Volume201
Issue number18
DOIs
Publication statusPublished - 2007 Jun 25

Fingerprint

Atomic force microscopy
atomic force microscopy
Thin films
thin films
Microscopes
microscopes
Nanoindentation
nanoindentation
coefficient of friction
Sol-gel process
Wear of materials
gels
Friction
Crystalline materials
X ray diffraction
diffraction
x rays

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Chung, Koo Hyun ; Lee, Yong Ha ; Kim, Young Tae ; Kim, Dae Eun ; Yoo, Jingyoo ; Hong, Seungbum. / Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy. In: Surface and Coatings Technology. 2007 ; Vol. 201, No. 18. pp. 7983-7991.
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Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy. / Chung, Koo Hyun; Lee, Yong Ha; Kim, Young Tae; Kim, Dae Eun; Yoo, Jingyoo; Hong, Seungbum.

In: Surface and Coatings Technology, Vol. 201, No. 18, 25.06.2007, p. 7983-7991.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

AU - Chung, Koo Hyun

AU - Lee, Yong Ha

AU - Kim, Young Tae

AU - Kim, Dae Eun

AU - Yoo, Jingyoo

AU - Hong, Seungbum

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AB - In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.

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