In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1 - x)O3: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 μN normal force. It was determined that the wear rate of the PZT thin film was in the order of 10- 8 mm3/N·cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress.
Bibliographical noteFunding Information:
This work was supported by Samsung Advanced Institute of Technology (SAIT) and the Korea Ministry of Science and Technology through the National R&D Project for Nano Science and Technology (M1-0203-00-0031-06M0300-03110).
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry