Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim, Byungjin Jang, Jun Min Suh, Myoung Sub Noh, Sangtae Kim, Soo Deok Han, Young Geun Song, Do Hong Kim, Chong Yun Kang, Ho Won Jang, Wooyoung Lee

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.

Original languageEnglish
Pages (from-to)1841-1848
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume255
DOIs
Publication statusPublished - 2018 Feb 1

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Nanorods
nanorods
Hydrogen
switches
Switches
coatings
Coatings
sensors
Sensors
hydrogen
Oxides
metal oxides
Metals
room temperature
recovery
Vapors
vapors
Fluxes
Recovery
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Shim, Young Seok ; Jang, Byungjin ; Suh, Jun Min ; Noh, Myoung Sub ; Kim, Sangtae ; Han, Soo Deok ; Song, Young Geun ; Kim, Do Hong ; Kang, Chong Yun ; Jang, Ho Won ; Lee, Wooyoung. / Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors. In: Sensors and Actuators, B: Chemical. 2018 ; Vol. 255. pp. 1841-1848.
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Shim, YS, Jang, B, Suh, JM, Noh, MS, Kim, S, Han, SD, Song, YG, Kim, DH, Kang, CY, Jang, HW & Lee, W 2018, 'Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors', Sensors and Actuators, B: Chemical, vol. 255, pp. 1841-1848. https://doi.org/10.1016/j.snb.2017.08.198

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors. / Shim, Young Seok; Jang, Byungjin; Suh, Jun Min; Noh, Myoung Sub; Kim, Sangtae; Han, Soo Deok; Song, Young Geun; Kim, Do Hong; Kang, Chong Yun; Jang, Ho Won; Lee, Wooyoung.

In: Sensors and Actuators, B: Chemical, Vol. 255, 01.02.2018, p. 1841-1848.

Research output: Contribution to journalArticle

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T1 - Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

AU - Shim, Young Seok

AU - Jang, Byungjin

AU - Suh, Jun Min

AU - Noh, Myoung Sub

AU - Kim, Sangtae

AU - Han, Soo Deok

AU - Song, Young Geun

AU - Kim, Do Hong

AU - Kang, Chong Yun

AU - Jang, Ho Won

AU - Lee, Wooyoung

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N2 - We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.

AB - We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.

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