Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim; Byungjin Jang; Jun Min Suh; Myoung Sub Noh; Sangtae Kim; Soo Deok Han; Young Geun Song; Do Hong Kim; Chong Yun Kang; Ho Won Jang; Wooyoung Lee

doi:10.1016/j.snb.2017.08.198

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

Young Seok Shim, Byungjin Jang, Jun Min Suh, Myoung Sub Noh, Sangtae Kim, Soo Deok Han, Young Geun Song, Do Hong Kim, Chong Yun Kang, Ho Won Jang, Wooyoung Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

We present a simple and facile method for producing high-performance hydrogen (H₂) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO₂/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO₂ nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H₂. For 20-nm-thick Pd-coated SiO₂ nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO₂ nanorods. They also exhibited the high H₂ sensing performance as Pd-coated SiO₂ nanorods. We strongly believe that high H₂ sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H₂ switches and sensors based on H₂-induced lattice expansion.

Original language	English
Pages (from-to)	1841-1848
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	255
DOIs	https://doi.org/10.1016/j.snb.2017.08.198
Publication status	Published - 2018 Feb

Bibliographical note

Funding Information:
This work was financially supported by the Priority Research Centers Program ( 2009-0093823 ), the Basic Science Research Program (2017R1A2B3009135), the Future Material Discovery Program (2016M3D1A1027666), and the Nano·Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea, , and the Institute for Information & Communications Technology Promotion (IITP) grant funded by the Korean government (MSIP) (No. 2015-0-00318 , Olfactory Bio Data Based Emotion Enhancement Interactive Content Technology Development ).

Publisher Copyright:
© 2017 Elsevier B.V.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2017.08.198

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@article{83523f8a0a72454ca802a8d4acbb9c92,

title = "Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors",

abstract = "We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.",

author = "Shim, {Young Seok} and Byungjin Jang and Suh, {Jun Min} and Noh, {Myoung Sub} and Sangtae Kim and Han, {Soo Deok} and Song, {Young Geun} and Kim, {Do Hong} and Kang, {Chong Yun} and Jang, {Ho Won} and Wooyoung Lee",

note = "Funding Information: This work was financially supported by the Priority Research Centers Program ( 2009-0093823 ), the Basic Science Research Program (2017R1A2B3009135), the Future Material Discovery Program (2016M3D1A1027666), and the Nano·Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea, , and the Institute for Information & Communications Technology Promotion (IITP) grant funded by the Korean government (MSIP) (No. 2015-0-00318 , Olfactory Bio Data Based Emotion Enhancement Interactive Content Technology Development ). Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2018",

month = feb,

doi = "10.1016/j.snb.2017.08.198",

language = "English",

volume = "255",

pages = "1841--1848",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

}

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors. / Shim, Young Seok; Jang, Byungjin; Suh, Jun Min; Noh, Myoung Sub; Kim, Sangtae; Han, Soo Deok; Song, Young Geun; Kim, Do Hong; Kang, Chong Yun; Jang, Ho Won; Lee, Wooyoung.

In: Sensors and Actuators, B: Chemical, Vol. 255, 02.2018, p. 1841-1848.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

AU - Shim, Young Seok

AU - Jang, Byungjin

AU - Suh, Jun Min

AU - Noh, Myoung Sub

AU - Kim, Sangtae

AU - Han, Soo Deok

AU - Song, Young Geun

AU - Kim, Do Hong

AU - Kang, Chong Yun

AU - Jang, Ho Won

AU - Lee, Wooyoung

N1 - Funding Information: This work was financially supported by the Priority Research Centers Program ( 2009-0093823 ), the Basic Science Research Program (2017R1A2B3009135), the Future Material Discovery Program (2016M3D1A1027666), and the Nano·Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea, , and the Institute for Information & Communications Technology Promotion (IITP) grant funded by the Korean government (MSIP) (No. 2015-0-00318 , Olfactory Bio Data Based Emotion Enhancement Interactive Content Technology Development ). Publisher Copyright: © 2017 Elsevier B.V.

PY - 2018/2

Y1 - 2018/2

N2 - We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.

AB - We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H2. For 20-nm-thick Pd-coated SiO2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO2 nanorods. They also exhibited the high H2 sensing performance as Pd-coated SiO2 nanorods. We strongly believe that high H2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H2 switches and sensors based on H2-induced lattice expansion.

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DO - 10.1016/j.snb.2017.08.198

M3 - Article

AN - SCOPUS:85028727995

VL - 255

SP - 1841

EP - 1848

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

ER -

Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors

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