Abstract
We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.
| Original language | English |
|---|---|
| Pages (from-to) | 1841-1848 |
| Number of pages | 8 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 255 |
| DOIs | |
| Publication status | Published - 2018 Feb 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry
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Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors. / Shim, Young Seok; Jang, Byungjin; Suh, Jun Min; Noh, Myoung Sub; Kim, Sangtae; Han, Soo Deok; Song, Young Geun; Kim, Do Hong; Kang, Chong Yun; Jang, Ho Won; Lee, Wooyoung.
In: Sensors and Actuators, B: Chemical, Vol. 255, 01.02.2018, p. 1841-1848.Research output: Contribution to journal › Article
TY - JOUR
T1 - Nanogap-controlled Pd coating for hydrogen sensitive switches and hydrogen sensors
AU - Shim, Young Seok
AU - Jang, Byungjin
AU - Suh, Jun Min
AU - Noh, Myoung Sub
AU - Kim, Sangtae
AU - Han, Soo Deok
AU - Song, Young Geun
AU - Kim, Do Hong
AU - Kang, Chong Yun
AU - Jang, Ho Won
AU - Lee, Wooyoung
PY - 2018/2/1
Y1 - 2018/2/1
N2 - We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.
AB - We present a simple and facile method for producing high-performance hydrogen (H 2 ) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO 2 /Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness of Pd films. At room temperature in ambient air, 15-nm-thick Pd-coated SiO 2 nanorods showed the rapid on-off switches. The average response time was approximately 2.8 s (the longest response time: 5 s), and the recovery time was less than 1 s for 2%–0.8% H 2 . For 20-nm-thick Pd-coated SiO 2 nanorods, detection of limit was reduced to 10 ppm due to semi-on-off operation. The reproducibility of our approaches was investigated by fabricating the Pd-coated SnO 2 nanorods. They also exhibited the high H 2 sensing performance as Pd-coated SiO 2 nanorods. We strongly believe that high H 2 sensing performance of Pd nanogap controlled metal oxide nanorods provides a new perspective for room-temperature H 2 switches and sensors based on H 2 -induced lattice expansion.
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U2 - 10.1016/j.snb.2017.08.198
DO - 10.1016/j.snb.2017.08.198
M3 - Article
AN - SCOPUS:85028727995
VL - 255
SP - 1841
EP - 1848
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
ER -