Nanoimprinting of conductive tracks using metal nanopowders

Seok Min Kim, Jinsu Kim, Jiseok Lim, Minseok Choi, Shinill Kang, Sukwon Lee, Hyuk Kim

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Abstract

A method for metal nanopowder imprinting is proposed as a patterning process for conductive tracks, which is inexpensive and scalable down to submicrometers. To examine the feasibility of the proposed method, conductive tracks with widths of submicrometers to a few tens of micrometers were formed using a thermal nanoimprinting system, and the effects of processing conditions on the degree of replication and the degree of sintering and the electric conductivity of imprinted conductive tracks were analyzed.

Original languageEnglish
Article number143117
JournalApplied Physics Letters
Volume91
Issue number14
DOIs
Publication statusPublished - 2007 Oct 11

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Kim, S. M., Kim, J., Lim, J., Choi, M., Kang, S., Lee, S., & Kim, H. (2007). Nanoimprinting of conductive tracks using metal nanopowders. Applied Physics Letters, 91(14), [143117]. https://doi.org/10.1063/1.2795789