A method for metal nanopowder imprinting is proposed as a patterning process for conductive tracks, which is inexpensive and scalable down to submicrometers. To examine the feasibility of the proposed method, conductive tracks with widths of submicrometers to a few tens of micrometers were formed using a thermal nanoimprinting system, and the effects of processing conditions on the degree of replication and the degree of sintering and the electric conductivity of imprinted conductive tracks were analyzed.
Bibliographical noteFunding Information:
This work was supported by the Korea Science and Engineering Foundation (KOSEF) grant funded by the Korea government (MOST) (No. R0A-2004-000-10368-0).
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)