Nanoindentation and Bending Fracture Behavior of Flexible Sulfide Thin Films Grown at Near Room Temperature With in Situ Tensile/Compressive Stress

Engineering & Materials Science

• Nanoindentation 100%
• Sulfides 95%
• Compressive stress 86%
• Tensile stress 82%
• Thin films 78%
• Fracture toughness 49%
• Fracture energy 33%
• Temperature 33%
• Residual stresses 24%
• Elastic moduli 23%
• Substrates 19%
• Cracks 18%
• Testing 14%

Physics & Astronomy

• sulfides 88%
• nanoindentation 83%
• tensile stress 56%
• fracture strength 54%
• thin films 42%
• releasing 33%
• residual stress 25%
• modulus of elasticity 22%
• cracks 21%
• evaluation 17%
• augmentation 16%
• energy 8%

Chemistry

• Sulfide 65%
• Ambient Reaction Temperature 46%
• Fracture Energy 39%
• Residual Stress 36%
• Chemical Deposition 36%
• Resistance 34%
• Deposition Process 29%
• Strain 19%
• Liquid Film 13%
• Surface 8%