Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

Hyungjun Kim, Han Bo Ram Lee, Woo Hee Kim, Sang Joon Park, In Chan Hwang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO2 nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.

Original languageEnglish
Title of host publication2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009
Pages3-4
Number of pages2
DOIs
Publication statusPublished - 2009 Nov 23
Event2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009 - Traverse City, MI, United States
Duration: 2009 Jun 22009 Jun 5

Publication series

Name2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009

Other

Other2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009
CountryUnited States
CityTraverse City, MI
Period09/6/209/6/5

Fingerprint

Nanostructured materials
Supercritical fluids
Epitaxial growth
Fabrication
Thin films
Atomic layer deposition
Aluminum Oxide
Nanorods
Block copolymers
Nanowires
Nanoparticles
Aluminum
Plasmas
Oxides

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Kim, H., Lee, H. B. R., Kim, W. H., Park, S. J., & Hwang, I. C. (2009). Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. In 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009 (pp. 3-4). [5167578] (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009). https://doi.org/10.1109/NMDC.2009.5167578
Kim, Hyungjun ; Lee, Han Bo Ram ; Kim, Woo Hee ; Park, Sang Joon ; Hwang, In Chan. / Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009. 2009. pp. 3-4 (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009).
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abstract = "With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nanotemplate. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nanotemplate as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO2 nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.",
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Kim, H, Lee, HBR, Kim, WH, Park, SJ & Hwang, IC 2009, Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. in 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009., 5167578, 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009, pp. 3-4, 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009, Traverse City, MI, United States, 09/6/2. https://doi.org/10.1109/NMDC.2009.5167578

Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. / Kim, Hyungjun; Lee, Han Bo Ram; Kim, Woo Hee; Park, Sang Joon; Hwang, In Chan.

2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009. 2009. p. 3-4 5167578 (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kim H, Lee HBR, Kim WH, Park SJ, Hwang IC. Nanomaterials fabrication using advanced thin film deposition and nanohybrid process. In 2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009. 2009. p. 3-4. 5167578. (2009 IEEE Nanotechnology Materials and Devices Conference, NMDC 2009). https://doi.org/10.1109/NMDC.2009.5167578