Nanomechanical hydrogen sensing

X. M.H. Huang, M. Manolidis, Seong Chan Jun, J. Hone

Research output: Contribution to journalArticlepeer-review

103 Citations (Scopus)

Abstract

A nanomechanical beam resonator is used as a sensitive, specific hydrogen sensor. The beam is fabricated from AuPd alloy and tested by magnetomotive transduction at room temperature. The fundamental resonance frequency decreases significantly and reversibly at hydrogen pressures above 10-5 Torr, whereas the frequency shifts observed for other gases are significantly smaller. The large frequency shift is likely due to the formation of interstitial hydrogen in the metal alloy lattice, which relieves the built-in tensile stress in the resonator beam. The uptake of hydrogen as measured by frequency shift is consistent with previous studies.

Original languageEnglish
Article number143104
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume86
Issue number14
DOIs
Publication statusPublished - 2005 Apr 4

Bibliographical note

Funding Information:
This work was partially supported by the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award No. CHE-0117752 and by the New York State Office of Science, Technology, and Academic Research (NYSTAR).

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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