@article{b24951bbdac34ff6ba8110475ac18ce4,
title = "Nanometer-level repeatable metrology using the Nanoruler",
author = "Konkola, {Paul T.} and Chen, {Carl G.} and Heilmann, {Ralf K.} and Chulmin Joo and Montoya, {Juan C.} and Chang, {Chih Hao} and Schattenburg, {Mark L.}",
year = "2003",
doi = "10.1116/1.1610003",
language = "English",
volume = "21",
pages = "3097--3101",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
number = "6",
}