Nanometer-level repeatable metrology using the Nanoruler

Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann, Chulmin Joo, Juan C. Montoya, Chih Hao Chang, Mark L. Schattenburg

Research output: Contribution to journalArticle

47 Citations (Scopus)
Original languageEnglish
Pages (from-to)3097-3101
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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