Nanosheet thickness-modulated MoS2 dielectric property evidenced by field-effect transistor performance

Sung Wook Min, Hee Sung Lee, Hyoung Joon Choi, Min Kyu Park, Taewook Nam, Hyungjun Kim, Sunmin Ryu, Seongil Im

Research output: Contribution to journalArticle

61 Citations (Scopus)

Abstract

We report on the nanosheet-thickness effects on the performance of top-gate MoS2 field-effect transistors (FETs), which is directly related to the MoS2 dielectric constant. Our top-gate nanosheet FETs with 40 nm thin Al2O3 displayed at least an order of magnitude higher mobility than those of bottom-gate nanosheet FETs with 285 nm thick SiO 2, benefiting from the dielectric screening by high-k Al 2O3. Among the top-gate devices, the single-layered FET demonstrated the highest mobility of ∼170 cm2 V-1 s-1 with 90 mV dec-1 as the smallest subthreshold swing (SS) but the double- and triple-layered FETs showed only ∼25 and ∼15 cm2 V-1 s-1 respectively with the large SS of 0.5 and 1.1 V dec-1. Such property degradation with MoS2 thickness is attributed to its dielectric constant increase, which could rather reduce the benefits from the top-gate high-k dielectric.

Original languageEnglish
Pages (from-to)548-551
Number of pages4
JournalNanoscale
Volume5
Issue number2
DOIs
Publication statusPublished - 2013 Jan 21

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Nanosheets
Field effect transistors
Dielectric properties
Permittivity
Gates (transistor)
Screening
Degradation

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Min, Sung Wook ; Lee, Hee Sung ; Choi, Hyoung Joon ; Park, Min Kyu ; Nam, Taewook ; Kim, Hyungjun ; Ryu, Sunmin ; Im, Seongil. / Nanosheet thickness-modulated MoS2 dielectric property evidenced by field-effect transistor performance. In: Nanoscale. 2013 ; Vol. 5, No. 2. pp. 548-551.
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Nanosheet thickness-modulated MoS2 dielectric property evidenced by field-effect transistor performance. / Min, Sung Wook; Lee, Hee Sung; Choi, Hyoung Joon; Park, Min Kyu; Nam, Taewook; Kim, Hyungjun; Ryu, Sunmin; Im, Seongil.

In: Nanoscale, Vol. 5, No. 2, 21.01.2013, p. 548-551.

Research output: Contribution to journalArticle

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