Nanostructure and microripple formation on the surface of sapphire with femtosecond laser pulses

Daejin Kim, Wooyoung Jang, Taehong Kim, Ayoung Moon, Ki Soo Lim, Myeongkyu Lee, Ik Bu Sohn, Sungho Jeong

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Abstract

We have demonstrated the creation of polarization-dependent nanogratings with a period of about 250 nm on the surface of sapphire by scanning the femtosecond laser beam with appropriate irradiation conditions. Laser fluence range for nanograting self-formation was very narrow in the slow scan mode. The grating depth variation was observed with atomic force microscope image analysis. To see the composition distribution in the nanostructure, we carried out the Auger signal analysis. In addition, we found a new periodic structure with a period of a few μm and discussed the complex formation mechanism.

Original languageEnglish
Article number093518
JournalJournal of Applied Physics
Volume111
Issue number9
DOIs
Publication statusPublished - 2012 May 1

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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