Nanowire composite thermoelectric devices

Alexis R. Abramson, Woo Chul Kim, Scott T. Huxtable, Haoquan Yan, Yiying Wu, Arun Majumdar, Chang Lin Tien, Peidong Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low thermal conductivity of the composite and presumably high power factor of the nanowires, a high figure of merit should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional growth of single-crystalline nanowires. To provide both structural support and thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was emb edded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron microscopy pictures illustrate the results of the fabrication processes. Using the 3w technique, the effective thermal conductivity of the nanowire matrix was measured.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages5
ISBN (Print)0791836428, 9780791836422
Publication statusPublished - 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering


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