Near-field scanning photoluminescence measurements using an uncoated fiber tip: A potential high resolution diagnostic technique for semiconductor devices

Ki Bong Song, Ji Eun Bae, Kyuman Cho, Sang Youp Yim, Seung Han Park

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Near-field scanning optical microscopy, in which an uncoated fiber tip is used for delivering excitation light and picking up photoluminescence, is applied for diagnosing defects in semiconductor devices. Using this high resolution, potentially subdiffraction limited, and fast acquisition time scanning μ-photoluminescence (PL) technique, we are able to locate nonluminescing defects in a multiple quantum well grown by molecular beam epitaxy. Near-field characteristics of the measured spectral PL intensity are also discussed.

Original languageEnglish
Pages (from-to)2260-2262
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number16
DOIs
Publication statusPublished - 1998 Dec 1

Fingerprint

semiconductor devices
near fields
photoluminescence
scanning
fibers
high resolution
defects
acquisition
molecular beam epitaxy
quantum wells
microscopy
excitation

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

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Near-field scanning photoluminescence measurements using an uncoated fiber tip : A potential high resolution diagnostic technique for semiconductor devices. / Song, Ki Bong; Bae, Ji Eun; Cho, Kyuman; Yim, Sang Youp; Park, Seung Han.

In: Applied Physics Letters, Vol. 73, No. 16, 01.12.1998, p. 2260-2262.

Research output: Contribution to journalArticle

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