Neural network based modeling for the growth rate of ZnO thin films on the pulsed laser deposition

Young Don Ko, Hong Seong Kang, Min Chang Jeong, Sang Yeol Lee, Jae Min Myoung, Ilgu Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study the D-optimal design was used to make design matrix in this experiment. Neural networks (NNets) based on the backpropagation (BP) algorithm are applied to the pulsed laser deposition (PLD) process modeling in order to construct the model for the growth rate of the ZnO thin films.

Original languageEnglish
Title of host publicationIMFEDK 2004 - International Meeting for Future of Electron Devices, Kansai
EditorsHiroshi Nozawa
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages79-80
Number of pages2
ISBN (Electronic)0780384237, 9780780384231
DOIs
Publication statusPublished - 2004
Event2nd International Meeting for Future of Electron Devices, Kansai, IMFEDK 2004 - Kyoto, Japan
Duration: 2004 Jul 262004 Jul 28

Publication series

NameIMFEDK 2004 - International Meeting for Future of Electron Devices, Kansai

Other

Other2nd International Meeting for Future of Electron Devices, Kansai, IMFEDK 2004
CountryJapan
CityKyoto
Period04/7/2604/7/28

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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