Neural network based modeling of PL intensity in PLD-grown ZnO thin films

Young Don Ko, Hong Seong Kang, Min Chang Jeong, Sang Yeol Lee, Jae Min Myoung, Ilgu Yun

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The process modeling of ZnO thin films grown by pulsed laser deposition (PLD) was investigated using neural networks based on radial basis function networks (RBFN) and multi-layer perceptron (MLP). Two input factors were examined with respect to the response factor, photoluminescence (PL), which is one of the main factors to determine the optical characteristic of the structure. In order to minimize the joint confidence region of fabrication process with varying the conditions, D-optimal experimental design technique was performed and PL intensity was characterized by neural networks. The statistical results were then used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can optimize the process conditions for semiconductor manufacturing.

Original languageEnglish
Pages (from-to)159-163
Number of pages5
JournalJournal of Materials Processing Technology
Volume159
Issue number2
DOIs
Publication statusPublished - 2005 Jan 30

Fingerprint

Pulsed Laser Deposition
Photoluminescence
Pulsed laser deposition
Thin Films
Neural Networks
Neural networks
Thin films
Radial basis function networks
Multilayer neural networks
Modeling
Design of experiments
Optimal Experimental Design
D-optimal
Semiconductor Manufacturing
Radial Basis Function Network
Confidence Region
Nonlinear Process
Process Modeling
Semiconductor materials
Perceptron

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Computer Science Applications
  • Metals and Alloys
  • Industrial and Manufacturing Engineering

Cite this

Ko, Young Don ; Kang, Hong Seong ; Jeong, Min Chang ; Lee, Sang Yeol ; Myoung, Jae Min ; Yun, Ilgu. / Neural network based modeling of PL intensity in PLD-grown ZnO thin films. In: Journal of Materials Processing Technology. 2005 ; Vol. 159, No. 2. pp. 159-163.
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Neural network based modeling of PL intensity in PLD-grown ZnO thin films. / Ko, Young Don; Kang, Hong Seong; Jeong, Min Chang; Lee, Sang Yeol; Myoung, Jae Min; Yun, Ilgu.

In: Journal of Materials Processing Technology, Vol. 159, No. 2, 30.01.2005, p. 159-163.

Research output: Contribution to journalArticle

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