New modeling of TFBAR and on-wafer inductor effects on the TFBAR ladder filter performance

Jong Soo Kim, Yong Dae Kim, Myeong Gweon Gu, Jong Gwan Yook

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

In this paper, a new modeling methodology for thin film bulk acoustic resonator (TFBAR) is presented and the formulations of each lumped element in the model are also presented. The proposed model has three optimization variables which is half of the Modified Butterworth-Van Dyke (MBVB) model, and as a result the curve fitting for the measured data is much faster and more accurate than any other conventional models. In addition, two types of TFBAR ladder filters are designed and fabricated to analyze the effects of on-wafer inductor integration. Fabricated on-water spiral inductor reveals the Q factor of 9 at 2 GHz and the inductor integrated filters have approximately 10 to 12 dB out-of-band rejection improvement compared to the original filters.

Original languageEnglish
Pages (from-to)379-382
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume1
Publication statusPublished - 2004 Sep 20
Event2004 IEEE MITT-S International Microwave Symposium Digest - Fort Worth, TX, United States
Duration: 2004 Jun 62004 Jun 11

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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