Nonlinearity in nanoelectromechanical resonators

Sungwon Moon, H. Jin Kim, J. S. Shin, J. H. Choi, I. S. Song, Whankyun Kim, Seong Chan Jun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanoelectromechanical resonators are promising as filters and sensors due to high Q factor. However, effects of nonlinearity become more prominent as the resonator dimension is reduced. In this work, room-temperature experimental data of Al/SiC nanoresonators obtained using magnetomotive transduction is analyzed with a dynamic model including nonlinear spring and damping effects. Transition between the linear harmonic oscillation and nonlinear regime is observed. Nonlinearity caused by large AC driving voltage is reduced with increasing DC voltage, and vanishes when the resonant amplitude becomes smaller than the calculated critical amplitude.

Original languageEnglish
Title of host publication2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
Pages858-861
Number of pages4
Publication statusPublished - 2009 Dec 1
Event2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 - Genoa, Italy
Duration: 2009 Jul 262009 Jul 30

Publication series

Name2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009

Other

Other2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
CountryItaly
CityGenoa
Period09/7/2609/7/30

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All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Electrical and Electronic Engineering

Cite this

Moon, S., Kim, H. J., Shin, J. S., Choi, J. H., Song, I. S., Kim, W., & Jun, S. C. (2009). Nonlinearity in nanoelectromechanical resonators. In 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 (pp. 858-861). [5394667] (2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009).