Abstract
Nanoelectromechanical resonators are promising as filters and sensors due to high Q factor. However, effects of nonlinearity become more prominent as the resonator dimension is reduced. In this work, room-temperature experimental data of Al/SiC nanoresonators obtained using magnetomotive transduction is analyzed with a dynamic model including nonlinear spring and damping effects. Transition between the linear harmonic oscillation and nonlinear regime is observed. Nonlinearity caused by large AC driving voltage is reduced with increasing DC voltage, and vanishes when the resonant amplitude becomes smaller than the calculated critical amplitude.
| Original language | English |
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| Title of host publication | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 |
| Pages | 858-861 |
| Number of pages | 4 |
| Publication status | Published - 2009 |
| Event | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 - Genoa, Italy Duration: 2009 Jul 26 → 2009 Jul 30 |
Publication series
| Name | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 |
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Other
| Other | 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 |
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| Country | Italy |
| City | Genoa |
| Period | 09/7/26 → 09/7/30 |
All Science Journal Classification (ASJC) codes
- Process Chemistry and Technology
- Electrical and Electronic Engineering
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Cite this
Moon, S., Kim, H. J., Shin, J. S., Choi, J. H., Song, I. S., Kim, W., & Jun, S. C. (2009). Nonlinearity in nanoelectromechanical resonators. In 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 (pp. 858-861). [5394667] (2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009).